Formation of the image of an edge dislocation in an absorbing crystal

被引:0
|
作者
I. A. Smirnova
É. V. Suvorov
E. V. Shulakov
机构
[1] Russian Academy of Sciences,Institute of Solid State Physics
[2] Russian Academy of Sciences,Institute of Microelectronic Technology and Ultra
来源
Physics of the Solid State | 2007年 / 49卷
关键词
61.10.Nz; 61.72.Ff; 61.72.Dd;
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学科分类号
摘要
The specific features of the formation of a diffraction image of a single edge dislocation in the case where the defect region can be located at different points of the scattering triangle are investigated by computer simlation and experimentally. The dislocation images are experimentally obtained at different wavelengths and for different reflections. The diffraction geometry in which the dislocation line is perpendicular to the sample surface and the Burgers vector is parallel or perpendicular to the reciprocal lattice vector is studied. From analysis of the experimental and theoretical images, inferences are made regarding the image symmetry, as well as the angular resolution and the sensitivity of section topography to the formation of the dislocation image. Special attention is focused on the dependence of the image contrast and the image size on the radiation wavelength, the magnitude of the reciprocal lattice vector, and the interference absorption.
引用
收藏
页码:1104 / 1110
页数:6
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