Application of a focused ion beam to prepare electron microscopy samples of surface nanostructures

被引：0
|
作者：
R. L. Volkov
N. I. Borgardt
V. N. Kukin
A. S. Prikhod’ko
A. S. Basaev
Yu. P. Shaman
机构：
[1] Moscow Institute of Electronic Technology,
[2] Technological Center MIET Scientific and Manufacturing Complex,undefined
来源：
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques | 2011年 / 5卷
关键词：
Neutron Technique; Protective Barrier; Surface Nanostructures; Platinum Layer; Lanthanum Hexaboride;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Carbon nanotubes grown on a silicon substrate with an array of FeNiCo20 catalyst islands are studied using focused ion beam and transmission electron microscopy. A method for preparing cross-sectional samples is proposed, which makes it possible to exclude the destructive effect of the ion beam on surface nanostructures during sample preparation using a microscopic three-dimensional protective barrier.
引用
收藏
页码：900 / 904
页数：4
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