Development of an advanced micro-positioning system for increasing operation accuracy: Consideration of high pressure sealing

被引：0
|
作者：
Pluemer, Sabrina [1 ]
Voges-Schwieger, Kathrin [2 ]
Denkena, Berend [1 ]
Behrens, Bernd-Arno [2 ]
机构：
[1] Institute of Production Engineering and Machine Tools, Leibniz Universitaet Hannover, An der Universitaet 2, 30823 Garbsen, Germany
[2] Institute of Forming Technology and Machines, Leibniz Universitaet Hannover, An der Universitaet 2, 30823 Garbsen, Germany
来源：
Production Engineering | 2012年 / 6卷 / 02期
关键词：
Compendex;
D O I：
10.1007/s11740-012-0361-2
中图分类号：
学科分类号：
摘要：
Piezoelectric actuators
引用
收藏
页码：213 / 218
页数：5
相关论文
共 20 条
  • [1] A high accuracy algorithm of displacement measurement for a micro-positioning stage
    Zhang, Xiang
    Zhang, Xianmin
    Wu, Heng
    Gan, Jinqiang
    Li, Hai
    AIP ADVANCES, 2017, 7 (05):
  • [2] DEVELOPMENT AND IMPLEMENTATION OF A HIGH-SPEED OPEN LOOP CONTROL TECHNIQUE FOR MICRO-POSITIONING OF MECHANICAL STRUCTURES
    OZISIK, H
    KELTIE, RF
    PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1989, 11 (04): : 225 - 230
  • [3] Development of laser positioning system of high accuracy in the nanometer range
    Weidenfeller, Laura
    Schienbein, Ralf
    Kirchner, Johannes
    Reinhardt, Carsten
    Manske, Eberhard
    ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS XI, 2018, 10544
  • [4] Development of 2-axis hybrid positioning system for precision contouring on micro-milling operation
    Syahputra, Hendra Prima
    Ko, Tae Jo
    Chung, Byeong Mook
    JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY, 2014, 28 (02) : 691 - 697
  • [5] Development of 2-axis hybrid positioning system for precision contouring on micro-milling operation
    Hendra Prima Syahputra
    Tae Jo Ko
    Byeong Mook Chung
    Journal of Mechanical Science and Technology, 2014, 28 : 691 - 697
  • [6] DEVELOPMENT AND OPERATION OF A HIGH-CURRENT DENSITY HIGH-PRESSURE ADVANCED ELECTROLYSIS CELL
    NAYAR, MG
    RAGUNATHAN, P
    MITRA, SK
    INTERNATIONAL JOURNAL OF HYDROGEN ENERGY, 1980, 5 (01) : 65 - 74
  • [7] Development of the Quasi-Zenith satellite system and high-accuracy positioning experiment system flight model
    Noda, Hiroyuki
    Kogure, Satoshi
    Kishimoto, Motohisa
    Soga, Hiroshi
    Moriguchi, Tatsuji
    Furubayashi, Takeshi
    NEC Technical Journal, 2010, 5 (03): : 93 - 97
  • [8] Development of Drive System of High Performance Micro Positioning Worktable Based on Giant Magnetostrictive Material
    Yu C.
    Wang C.
    Xie T.
    Yang L.
    Jiang Z.
    Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2019, 55 (09): : 136 - 143
  • [9] Development of High-Pressure ESR System Using Micro-coil
    Kohei Kawasaki
    Takahiro Sakurai
    Eiji Ohmichi
    Susumu Okubo
    Hitoshi Ohta
    Kazuyuki Matsubayashi
    Yoshiya Uwatoko
    Applied Magnetic Resonance, 2015, 46 : 987 - 992
  • [10] Development of High-Pressure ESR System Using Micro-coil
    Kawasaki, Kohei
    Sakurai, Takahiro
    Ohmichi, Eiji
    Okubo, Susumu
    Ohta, Hitoshi
    Matsubayashi, Kazuyuki
    Uwatoko, Yoshiya
    APPLIED MAGNETIC RESONANCE, 2015, 46 (09) : 987 - 992
12