Growth of Ga2O3 thin films on Si(100) substrates using a trimethylgallium and oxygen mixture

被引：0
|
作者：
Hyoun Woo Kim
Nam Ho Kim
Chongmu Lee
机构：
[1] Inha University Yonghyun-dong,School of Material Science and Engineering
来源：
Journal of Materials Science | 2004年 / 39卷
关键词：
Oxygen; Polymer; Thin Film; Ga2O3; Oxygen Mixture;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
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页码：3461 / 3463
页数：2
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