On the theory of microwave discharges excited on the surface of a dielectric antenna

被引：0
|
作者：
S. A. Dvinin
V. M. Shibkov
V. V. Mikheev
机构：
[1] Moscow State University,
来源：
Plasma Physics Reports | 2006年 / 32卷
关键词：
52.80.Pi; 52.25.Jm;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Microwave gas discharges excited near a dielectric surface are investigated. Such discharges can exist over a broad range of gas pressures and thereby can be used to solve a wide variety of applied problems. The wave dispersion properties favorable for discharge excitation are analyzed, and a kinetic discharge model is considered that can be used to calculate the discharge parameters. A model of a steady discharge at gas pressures of 102–104 Pa is constructed.
引用
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页码：601 / 611
页数：10
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