ZnO/ZnO:Al window and contact layer for thin film solar cells: High rate deposition by simultaneous RF and DC magnetron sputtering

被引：1
|
作者：
Ellmer, K [1 ]
Wendt, R [1 ]
Cebulla, R [1 ]
机构：
[1] HAHN MEITNER INST BERLIN GMBH,DEPT SOLAR ENERGET,D-14109 BERLIN,GERMANY
来源：
CONFERENCE RECORD OF THE TWENTY FIFTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 1996 | 1996年
关键词：
D O I：
10.1109/PVSC.1996.564269
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
引用
收藏
页码：881 / 884
页数：4
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