Micro-opto-electro-mechanical systems

被引：0
|
作者：
Wu, MC [1 ]
机构：
[1] Univ Calif Los Angeles, Dept Elect Engn, Los Angeles, CA 90095 USA
来源：
SPACE 2000, PROCEEDINGS | 2000年
关键词：
D O I：
暂无
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
The Micra-Electro-Mechancial Systems (MEMS) technology has opened up many new opportunities for optics. For the first time, reliable microactuators and three-dimensional optomechanical structures can be monolithically integrated with microoptical elements. This new technology will impact many applications including display, scanning, and telecommunications. In this paper, we will discuss two applications of MEMS: Optical systems on a chip, and scalable optical switches for optical crossconnect.
引用
收藏
页码：488 / 494
页数：7
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