A large gap of radio frequency dielectric barrier atmospheric pressure glow discharge

被引:31
|
作者
Li, B. [1 ]
Chen, Q. [1 ]
Liu, Z. W. [1 ]
机构
[1] Beijing Inst Graph Commun, Lab Plasma Phys & Mat, Beijing 102600, Peoples R China
基金
美国国家科学基金会;
关键词
argon; glow discharges; high-frequency discharges; Langmuir probes; nitrogen; plasma diagnostics; secondary electron emission;
D O I
10.1063/1.3299010
中图分类号
O59 [应用物理学];
学科分类号
摘要
A large gap was acquired between electrodes (up to 5.5 mm) of Ar atmospheric pressure glow discharge in radio frequency dielectric barrier discharge (rf-DBD). The discharge of Ar plasma was characterized by I-V curve and Lissajous plot, and the effective power of the discharge was calculated based on the measured Lissajous plot and found to be higher than 90% of the input power. To gain a thorough understanding of the mechanism, the rf-DBD with a single dielectric barrier layer operating in gamma mode glow discharge of N-2 plasma was diagnosed in spatial resolution through optical emission spectroscopy. It was concluded that secondary electron emission might be responsible for the sustainable glow discharge in the large gap rf-DBD plasma.
引用
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页数:3
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