A complementary metal-oxide-semiconductor anode array chip with two rows of 512 anodes and dual integrated analog read-out circuitry

被引:5
|
作者
Nevejans, D
Neefs, E
Kavadias, S
Merken, P
Van Hoof, C
Gramegna, G
Bastiaens, J
Dierickx, B
机构
[1] Belgian Inst Space Aeron, IASB, BIRA, B-1180 Brussels, Belgium
[2] IMEC, B-3001 Louvain, Belgium
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2000年 / 71卷 / 11期
关键词
D O I
10.1063/1.1318924
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A novel multianode electron detector chip (LEDA512) has been designed, fabricated and tested using a 0.7 mum complementary metal-oxide-semiconductor technology. This chip, mounted behind a stack of two microchannel plates, is used in a positive ion mass spectrometer selected by the European Space Agency for the ROSETTA cometary mission. Two functions are integrated on the chip: a dual row of 512 anodes, each having an area of 22 mu mx8 mm for the collection of electrons, and two separate anode multiplexer and charge amplifier units. For redundancy reasons the chip has been designed such that the two anode rows with their associated electronics are identical and may be used independently with separate clocks and power supplies. Tests have confirmed that the LEDA512/microchannel plate combination is working properly as an ion detector and that excellent noise and response may be obtained in combination with the mass spectrometer. (C) 2000 American Institute of Physics. [S0034-6748(00)04511-1].
引用
收藏
页码:4300 / 4305
页数:6
相关论文
共 13 条
  • [1] Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry
    Forsen, E
    Abadal, G
    Ghatnekar-Nilsson, S
    Teva, J
    Verd, J
    Sandberg, R
    Svendsen, W
    Perez-Murano, F
    Esteve, J
    Figueras, E
    Campabadal, F
    Montelius, L
    Barniol, N
    Boisen, A
    APPLIED PHYSICS LETTERS, 2005, 87 (04)
  • [2] Complementary metal-oxide-semiconductor microelectromechanical pressure sensor integrated with circuits on chip
    Dai, Ching-Liang
    Liu, Mao-Chen
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2007, 46 (02): : 843 - 848
  • [3] Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics
    Akiyama, T
    Staufer, U
    de Rooij, NF
    Lange, D
    Hagleitner, C
    Brand, O
    Baltes, H
    Tonin, A
    Hidber, HR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2000, 18 (06): : 2669 - 2675
  • [4] Fabrication of integrated chip with microinductors and micro-tunable capacitors by complementary metal-oxide-semiconductor postprocess
    Dai, CL
    Tsai, CH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (4A): : 2030 - 2036
  • [5] TWO-DEVICE NONDESTURCTIVE READ-OUT CELL WITH STACKED METAL OXIDE SEMICONDUCTOR DEVICES.
    Anon
    IBM technical disclosure bulletin, 1986, 28 (10): : 4299 - 4300
  • [6] Photosystem I Bio-Photosensor Integrated with Complementary Metal-Oxide-Semiconductor Source-Drain Follower on a Chip
    Tsukada, Junichi
    Ozawa, Hiroaki
    Uno, Shigeyasu
    Nakazato, Kazuo
    Terasaki, Nao
    Yamamoto, Noritaka
    Hiraga, Takashi
    Iwai, Masako
    Konno, Masae
    Ito, Kohsuke
    Inoue, Yasunori
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (01)
  • [7] Integrated Bio-Imaging Sensor Array with Complementary Metal-Oxide-Semiconductor Cascode Source-Drain Follower
    Matsumoto, Hirokazu
    Tsukada, Junichi
    Ozawa, Hiroaki
    Uno, Shigeyasu
    Nakazato, Kazuo
    Terasaki, Nao
    Yamamoto, Noritaka
    Hiraga, Takashi
    Iwai, Masako
    Konno, Masae
    Ito, Kohsuke
    Inoue, Yasunori
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (04)
  • [8] High-density impedance-sensing array on complementary metal-oxide-semiconductor circuitry assisted by negative dielectrophoresis for single-cell-resolution measurement
    Chung, Jaehoon
    Chen, Yu
    Kim, Seong-Jin
    SENSORS AND ACTUATORS B-CHEMICAL, 2018, 266 : 106 - 114
  • [9] Real-time, multiplexed electrochemical DNA detection using an active complementary metal-oxide-semiconductor biosensor array with integrated sensor electronics
    Levine, Peter M.
    Gong, Ping
    Levicky, Rastislav
    Shepard, Kenneth L.
    BIOSENSORS & BIOELECTRONICS, 2009, 24 (07): : 1995 - 2001
  • [10] A 3.5-4.5 GHz Complementary Metal-Oxide-Semiconductor Ultrawideband Receiver Frontend Low-Noise Amplifier with On-Chip Integrated Antenna for Interchip Communication
    Azhari, Afreen
    Kimoto, Kentaro
    Sasaki, Nobuo
    Kikkawa, Takamaro
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (04)