Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer

被引：0
|
作者：
Maddaloni, P [1 ]
Coppola, G [1 ]
De Natale, P [1 ]
De Nicola, S [1 ]
Ferraro, P [1 ]
Gioffrè, M [1 ]
Iodice, M [1 ]
机构：
[1] Ist Nazl Ott Applicata, I-80078 Pozzuoli, Italy
来源：
OPTICAL MICRO- AND NANOMETROLOGY IN MANUFACTURING TECHNOLOGY | 2004年 / 5458卷
关键词：
interferometry; thin plates; thickness; dispersion;
D O I：
10.1117/12.544955
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A novel broad-band telecom laser source is used to realize a lateral-shear scanning-wavelength interferometer for measuring the thickness of thin plates. We show that the wide tunability range allows to detect samples down to tens of microns with a relative uncertainty of less than 0.5% and a resolution of about 1 nm. A comparable accuracy in the thickness characterization of double-layer structures is also demonstrated. In turn, the wide tunability range needs the dispersion law of the materials to be taken into account in the model for correct thickness evaluation.
引用
收藏
页码：64 / 70
页数：7
相关论文
共 50 条
12345