Characterization of ordered mesoporous films on silicon (001) surface using X-ray and electron diffraction

被引：6
|
作者：
Liu, PH
Chao, KJ [1 ]
Guo, XJ
Huang, KY
Lee, YR
Cheng, CW
Chiu, MS
Chang, SL
机构：
[1] Natl Tsing Hua Univ, Dept Chem, Hsinchu 300, Taiwan
[2] Natl Tsing Hua Univ, Dept Phys, Hsinchu 300, Taiwan
来源：
JOURNAL OF APPLIED CRYSTALLOGRAPHY | 2005年 / 38卷
关键词：
D O I：
10.1107/S0021889804031498
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
A continuous silica film with well aligned mesochannels parallel to the Si( 001) surface was found to be formed through sol - gel dip-coating of a silica precursor with nonionic ethylene oxide surfactant. Two two-dimensional mesoporous structures in centered and non-centered rectangular symmetries and with the short axes of elongated ellipsoidal pores normal to the surface were observed by X-ray and electron diffraction. Detailed transmission electron microscopy investigations were employed to view the direction dependence of the channel or pore packing in the continuous film.
引用
收藏
页码：211 / 216
页数：6
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