MEMS ion source for mass spectrometer integrated on a chip

被引：5
|
作者：
Szyszka, P. [1 ]
Grzebyk, T. [1 ]
Gorecka-Drzazga, A. [1 ]
Dziuban, J. A. [1 ]
机构：
[1] Wroclaw Univ Sci & Technol, Fac Microsyst Elect & Photon, 11-17 Janiszewskiego Str, PL-50372 Wroclaw, Poland
来源：
16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016) | 2016年 / 773卷
关键词：
D O I：
10.1088/1742-6596/773/1/012099
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
The paper describes silicon-glass MEMS electron impact ion source developed for miniature mass spectrometer (MS) integrated on a chip. The device consists of the field emission electron source with an electrophoretically deposited carbon nanotube cathode and ion beam formation electrodes. Ion source structure has been fabricated using MEMS technology. A complete manufacturing process of the test structures has been successfully elaborated and implemented.
引用
收藏
页数：4
相关论文
共 50 条
  • [1] GLOW-DISCHARGE ION SOURCE FOR ON-CHIP INTEGRATED MINIATURE MEMS MASS SPECTROMETER
    Grzebyk, T.
    Szyszka, P.
    Gorecka-Drzazga, A.
    Dziuban, J. A.
    18TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS, 2019, 1407
  • [2] Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer
    Szyszka, Piotr
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2025, 34 (01) : 52 - 58
  • [3] Lateral Glow Discharge Ion Source for the Integrated MEMS Quadrupole Mass Spectrometer
    Szyszka, Piotr
    2024 37TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE, IVNC 2024, 2024,
  • [4] A MEMS electron impact ion source integrated in a microtime-of-flight mass spectrometer
    Tassetti, Charles-Marie
    Mahieu, Romain
    Danel, Jean-Sebastien
    Peyssonneaux, Olivier
    Progent, Frederic
    Polizzi, Jean-Philippe
    Machuron-Mandard, Xavier
    Duraffourg, Laurent
    SENSORS AND ACTUATORS B-CHEMICAL, 2013, 189 : 173 - 178
  • [5] A MEMS electron impact ion source integrated in a micro-time-of-flight mass spectrometer
    Tassetti, Charles-Marie
    Duraffourg, Laurent
    Danel, Jean-Sebastien
    Peyssonneaux, Olivier
    Progent, Frederic
    Machuron-Mandard, Xavier
    26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 2012, 47 : 538 - 541
  • [6] Glow-discharge ion source for MEMS mass spectrometer
    Grzebyk, Tomasz
    Szmajda, Tomasz
    Szyszka, Piotr
    Gorecka-Drzazga, Anna
    Dziuban, Jan
    VACUUM, 2020, 171
  • [7] Miniature Mass Spectrometer Integrated on a Chip
    Szyszka, Piotr
    Grzebyk, Tomasz
    Krysztof, Michal
    Gorecka-Drzazga, Anna
    Dziuban, Jan A.
    2017 30TH INTERNATIONAL VACUUM NANOELECTRONICS CONFERENCE (IVNC), 2017, : 186 - 187
  • [8] Optimization of an electron impact ion source on a MEMS time-of-flight mass spectrometer
    Vigne, Sebastien
    Alava, Thomas
    Tassetti, Charles-Marie
    Duraffourg, Laurent
    Progent, Frederic
    SENSORS AND ACTUATORS B-CHEMICAL, 2017, 243 : 690 - 695
  • [9] Mass spectra measured by a fully integrated MEMS mass spectrometer
    Hauschild, J-P.
    Wapelhorst, E.
    Mueller, J.
    INTERNATIONAL JOURNAL OF MASS SPECTROMETRY, 2007, 264 (01) : 53 - 60
  • [10] An upgraded ion source for a mass spectrometer
    A. N. Zavilopulo
    E. A. Mironets
    A. S. Agafonova
    Instruments and Experimental Techniques, 2012, 55 : 65 - 71
12345