Experimental evidence of collisionless power absorption in inductively coupled plasmas

被引：89
|
作者：
Godyak, VA
Piejak, RB
Alexandrovich, BM
Kolobov, VI
机构：
[1] OSRAM Sylvania Dev Inc, Beverly, MA 01915 USA
[2] CFD Res Corp, Huntsville, AL 35805 USA
来源：
PHYSICAL REVIEW LETTERS | 1998年 / 80卷 / 15期
关键词：
D O I：
10.1103/PhysRevLett.80.3264
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Electromagnetic power absorbed in inductively coupled plasma driven by a planar coil has been found directly from axial distributions of the rf electric field and current density measured with magnetic probes. It is shown that at gas pressure around 1 mTorr the absorbed power is much larger than that found from the cold plasma theory, and is in reasonable agreement with the one calculated in the framework of a theory for the anomalous skin effect in a two-dimensional system accounting for spatial dispersion of plasma conductivity.
引用
收藏
页码：3264 / 3267
页数：4
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