Passive reduced-order macromodeling algorithm for structure dynamics in MEMS systems

In this paper, a novel passive reduced-order macro-modeling algorithm is proposed for structure dynamics in MEMS systems that are described by discrete models through the use of finite element methods (FEM). In the proposed scheme, the system of equations given by the FEM formulation are converted to state-space form such that the state-space equations are compatible with passive Krylov subspace methods based on congruent transformations. As an example, modeling, simulation, and experimental studies are presented for a Butterfly gyro developed at the Imego Institute. Our simulation results for this example are in very good agreement with previous publications using traditional modeling techniques.