New insight into damage-related phenomena in Si implanted under extreme conditions

被引：0
|
作者：
Holland, OW [1 ]
Nielsen, B [1 ]
Budai, JD [1 ]
机构：
[1] OAK RIDGE NATL LAB,OAK RIDGE,TN 37831
来源：
ION-SOLID INTERACTIONS FOR MATERIALS MODIFICATION AND PROCESSING | 1996年 / 396卷
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D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：15 / 20
页数：6
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