Increase in thickness of PLD-Made Nd-Fe-B film magnets and a new application

We succeeded in the increase in thickness of PLD-made Nd-Fe-B thick film magnets up to 1200 mu m without deterioration of mechanical and magnetic properties. The peeling phenomenon was not observed in all the as-deposited and annealed samples. The magnetic properties of all the annealed films with the thickness between 20-1200 mu m were almost the same, and the average values of He and Br were approximately 800 kA/m and 0.60 T, respectively. In addition, we prepared a new class of micro-motor using a 384 mu m-thick Nd-Fe-B film magnet. The motor exhibited a rotational speed of approximately 300 rpm and a starting torque of approximately 2 mu Nm. It was confirmed that the micro-motor using a thick film magnet is one of hopeful candidates as a new micro-machine.