Microsolidics: Fabrication of three-dimensional metallic microstructures in poly(dimethylsiloxane)

被引:176
|
作者
Siegel, Adam C. [1 ]
Bruzewicz, Derek A. [1 ]
Weibel, Douglas B. [1 ]
Whitesides, George M. [1 ]
机构
[1] Harvard Univ, Dept Chem & Chem Biol, Cambridge, MA 02138 USA
关键词
D O I
10.1002/adma.200601787
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The fabrication of complex metallic microstructures in 3D by injecting liquid solder into microfluidic channels and allowing the solder to cool and solidify is demonstrated; after fabrication, the metallic structures can be flexed, bent, or twisted (see figure and cover). With this method it is possible to build flexible electronic circuits, complex embedded or freestanding 3D metal microstructures, 3D electronic components, and hybrid electronic-microfluidic devices.
引用
收藏
页码:727 / +
页数:8
相关论文
共 50 条
  • [1] Fabrication of topologically complex three-dimensional microstructures: Metallic microknots
    Wu, H
    Brittain, S
    Anderson, J
    Grzybowski, B
    Whitesides, S
    Whitesides, GM
    JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2000, 122 (51) : 12691 - 12699
  • [2] Fabrication and metallization of three-dimensional microstructures
    Baldacchini, T
    Lafratta, CN
    Farrer, RA
    Pons, AC
    Pons, J
    Bayindir, Z
    Naughton, MJ
    Saleh, BEA
    Teich, MC
    Fourkas, JT
    NONTRADITIONAL APPROACHES TO PATTERNING, 2004, : 159 - 161
  • [3] Elastocapillary fabrication of three-dimensional microstructures
    van Honschoten, J. W.
    Berenschot, J. W.
    Ondarcuhu, T.
    Sanders, R. G. P.
    Sundaram, J.
    Elwenspoek, M.
    Tas, N. R.
    APPLIED PHYSICS LETTERS, 2010, 97 (01)
  • [4] Fabrication of complex three-dimensional metallic microstructures based on femtosecond laser micromachining
    Chen, Feng
    Yang, Qing
    Shan, Chao
    Liu, Keying
    Meng, Xiangwei
    Hou, Xun
    2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2015,
  • [5] Fabrication of three-dimensional microarray structures by controlling the thickness and elasticity of poly (dimethylsiloxane) membrane
    Lee, Dae Ho
    Park, Joong Yull
    Lee, Eun-Joong
    Choi, Yoon Young
    Kwon, Gu Han
    Kim, Beop-Min
    Lee, Sang-Hoon
    BIOMEDICAL MICRODEVICES, 2010, 12 (01) : 49 - 54
  • [6] Fabrication of three-dimensional microarray structures by controlling the thickness and elasticity of poly(dimethylsiloxane) membrane
    Dae Ho Lee
    Joong Yull Park
    Eun-Joong Lee
    Yoon Young Choi
    Gu Han Kwon
    Beop-Min Kim
    Sang-Hoon Lee
    Biomedical Microdevices, 2010, 12 : 49 - 54
  • [7] Optical fabrication of three-dimensional polymeric microstructures
    Cheng, CM
    Li, B
    LeDuc, PR
    APPLIED PHYSICS LETTERS, 2005, 87 (16) : 1 - 3
  • [8] Fabrication of three-dimensional microstructures by soft molding
    Kim, YS
    Suh, KY
    Lee, HH
    APPLIED PHYSICS LETTERS, 2001, 79 (14) : 2285 - 2287
  • [9] LASER FABRICATION Folding three-dimensional microstructures
    Horiuchi, Noriaki
    NATURE PHOTONICS, 2012, 6 (12) : 803 - 803
  • [10] Fabrication of three dimensional microfluidic system in poly(dimethylsiloxane) on piezoelectric substrate
    Dong, Liang-Wei
    Zhang, An-Liang
    FERROELECTRICS, 2021, 570 (01) : 115 - 121