Simulation of internal stress waves generated by laser-induced damage in multilayer dielectric gratings

Multilayer dielectric (MLD) gratings used in ultrahigh-intensity laser systems often exhibit a laser-induced damage performance below that of their constituent materials. Reduced performance may arise from fabrication-and/or design-related issues. Finite element models were developed to simulate stress waves in MLD grating structures generated by laser-induced damage events. These models specifically investigate the influence of geometric and material parameters on how stress waves can lead to degradation of material structural integrity that can have adverse effects on its optical performance under subsequent laser irradiation: closer impedance matching of the layer materials reduces maximum interface stresses by similar to 20% to 30%; increasing sole thickness from 50 nm to 500 nm reduces maximum interface stresses by similar to 50%. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement