Deposition and characterization of La2Ti2O7 thin films via spray pyrolysis process

被引:17
|
作者
Todorovsky, D. S.
Todorovska, R. V.
Milanova, M. M.
Kovacheva, D. G.
机构
[1] Univ Sofia, Fac Chem, BU-1164 Sofia, Bulgaria
[2] Bulgarian Acad Sci, Inst Elect, BU-1784 Sofia, Bulgaria
[3] Bulgarian Acad Sci, Inst Gen & Inorgan Chem, BU-1113 Sofia, Bulgaria
关键词
citrates; deposition; lanthanum titanates; spray pyrolysis; thin films;
D O I
10.1016/j.apsusc.2006.10.016
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Thin films of La2Ti2O7 have been deposited on fused silica and Si substrates by a spray pyrolysis method using ethylene glycol solution of La(III)-Ti(IV)-citrate complexes as starting material and O-2 as a carrier gas. The composition, crystal structure and morphology of the films are studied. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:4560 / 4565
页数:6
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