Micromould based laser shock embossing of thin metal sheets for MEMS applications

被引：71
|
作者：
Liu, Huixia [1 ]
Shen, Zongbao [1 ]
Wang, Xiao [1 ]
Wang, Hejun [1 ]
Tao, Maoke [1 ]
机构：
[1] Jiangsu Univ, Sch Mech Engn, Zhenjiang 212013, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2010年 / 256卷 / 14期
关键词：
Laser-generated shock wave; Mould based microforming; Laser shock embossing; Finite element method; RATE PLASTIC-DEFORMATION; WAVES;
D O I：
10.1016/j.apsusc.2010.02.073
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Laser shock forming is a new material processing technology. Micro-channel with dimension of 260 mu m x 59 mu m was successfully fabricated on metallic foil surface using laser-generated shock wave. The work piece has a high spatial resolution at the micron-level. A series of experiments was conducted to validate the finite element model. An analysis procedure including dynamic analysis performed by ANSYS/LS-DYNA and static analysis performed by ANSYS is presented in detail to attain the simulation of laser shock embossing to predict the surface deformation. Micromould based laser shock embossing holds promise for achieving precise, well-controlled, low-cost, high efficiency of three-dimensional metallic microstructures. In addition, this technique can fabricate complex 3D microstructures directly by single pulse. (C) 2010 Elsevier B. V. All rights reserved.
引用
收藏
页码：4687 / 4691
页数：5
相关论文
共 50 条
  • [1] Laser shock microforming of thin metal sheets
    Ocana, J. L.
    Morales, M.
    Garcia-Ballesteros, J. J.
    Porro, J. A.
    Garcia, O.
    Molpeceres, C.
    APPLIED SURFACE SCIENCE, 2009, 255 (10) : 5633 - 5636
  • [2] Short pulse laser microforming of thin metal sheets for MEMS manufacturing
    Ocana, J. L.
    Morales, M.
    Molpeceres, C.
    Garcia, O.
    Porro, J. A.
    Garcia-Ballesteros, J. J.
    APPLIED SURFACE SCIENCE, 2007, 254 (04) : 997 - 1001
  • [3] Laser Shock Microforming of Thin Metal Sheets with ns Lasers
    Ocana, Jose L.
    Morales, M.
    Porro, J. A.
    Garcia-Ballesteros, J. J.
    Correa, C.
    LASERS IN MANUFACTURING 2011: PROCEEDINGS OF THE SIXTH INTERNATIONAL WLT CONFERENCE ON LASERS IN MANUFACTURING, VOL 12, PT B, 2011, 12 : 201 - 206
  • [4] Effect of plasma confinement on laser shock microforming of thin metal sheets
    Morales, M.
    Porro, J. A.
    Garcia-Ballesteros, J. J.
    Molpeceres, C.
    Ocana, J. L.
    APPLIED SURFACE SCIENCE, 2011, 257 (12) : 5408 - 5412
  • [5] Rubber-induced uniform laser shock wave pressure for thin metal sheets microforming
    Shen, Zongbao
    Wang, Xiao
    Liu, Huixia
    Wang, Yayuan
    Wang, Cuntang
    APPLIED SURFACE SCIENCE, 2015, 327 : 307 - 312
  • [6] Laser welding of porous thin sheets made of metal fibers
    Li, YG
    Kar, A
    Quick, NR
    TRENDS IN WELDING RESEARCH, PROCEEDINGS, 2003, : 489 - 494
  • [7] Laser assisted joining of metal pins and thin plastic sheets
    Bauernhuber, Andor
    Markovits, Tamas
    LASER ASSISTED NET SHAPE ENGINEERING 7 (LANE 2012), 2012, 39 : 108 - 116
  • [8] Keyhole shapes during laser welding of thin metal sheets
    Aalderink, B. J.
    de Lange, D. F.
    Aarts, R. G. K. M.
    Meijer, J.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2007, 40 (17) : 5388 - 5393
  • [9] Creep behavior of thin metal sheets during laser bending
    Ramos, JA
    20TH ICALEO 2001, VOLS 92 & 93, CONGRESS PROCEEDINGS, 2001, : 750 - 758
  • [10] Development of Robotized Laser Welding Applications for Joining Thin Sheets
    Iordachescu, Danut
    Blasco, Manuel
    Lopez, Raul
    Cuesta, Alberto
    Iordachescu, Mihaela
    Luis Ocana, Jose
    OPTIMIZATION OF THE ROBOTS AND MANIPULATORS, 2011, 8 : 200 - 204
12345