A Micro-Cantilever Based Photoacoustic Detector Of Terahertz Radiation For Chemical Sensing

被引：0
|
作者：
Glauvitz, Nathan E. [1 ]
Coutu, Ronald A., Jr. [1 ]
Petkie, Douglas T. [2 ]
Medvedev, Ivan R. [2 ]
机构：
[1] US Air Force, Inst Technol, Dept Elect & Comp Engn, 2950 Hobson Way, Wright Patterson AFB, OH 45433 USA
[2] Wright State Univ, Dept Phys, Dayton, OH 45435 USA
来源：
2013 38TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ) | 2013年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A Microelectromechanical system (MEMS) cantilever pressure sensor was designed, modeled, fabricated, and tested for sensing the photoacoustic response of gases to Terahertz (THz) radiation. This paper describes manufacturing, experimental set-up and the most recent spectroscopic results, which demonstrate the capabilities of this spectroscopic technique.
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页数：3
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