High-throughput micromachining of steel and ceramics with solid-state UV laser

被引：8
|
作者：
Govorkov, SV [1 ]
Slobodchikov, EV [1 ]
Wiessner, AO [1 ]
Basting, D [1 ]
机构：
[1] Lambda Phys USA Inc, Ft Lauderdale, FL 33309 USA
来源：
HIGH-POWER LASER ABLATION III | 2000年 / 4065卷
关键词：
micromachining; microdrilling; solid state UV laser; steel; ceramics;
D O I：
10.1117/12.407399
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Performance limits of 10 kHz, 15 nsec-pulse diode-pumped solid-state laser in microdrilling of metals and ceramics were studied. Average drilling rates approaching 1 cm/sec with micrometer-range accuracy of micro-holes are achievable in steel and ceramic samples up to 1 mm thick. We found that shielding effects of plasma plume can be minimized by proper selection of laser intensity. In samples 1 mm and thicker, using third harmonic output allows drilling of high aspect ratio holes at almost an order of magnitude higher ablation rates as compared to IR laser output.
引用
收藏
页码：790 / 800
页数：11
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