Atomic force microscopy of nickel dot arrays with tuning fork and nanotube probe

The advantages of tuning fork scanning force microscopy are combined with the unique properties of carbon nanotubes to improve the spatial resolution of atomic force microscopy (AFM) images of nickel dot arrays. These arrays have high relief features that prevent the resolution-of the actual dot size and shape with a regular cantilever tip. The modification of two key parts of a commercial AFM, the force sensor, and the probe allowed the, acquisition of true data on feature size and shape. AFM images of Ni dot arrays were taken using conventional optical detection of a commercial cantilever, tuning fork with attached commercial cantilever tip, and tuning fork with attached multiwalled carbon nanotube. The resolutions of the AFM images were compared, and it was shown that probing with a carbon nanotube provided a 30% improvement of lateral resolution compared to a conventional AFM tip. (C) 2003 American Vacuum Society.