Design and characterization of high-torque/low-speed silicon based electrostatic micromotors using stator/rotor contact interactions

Capabilities of future direct-drive electrostatic actuators are investigated through the mechanical characterization of annular-type polysilicon micromotors. Contact interactions are provided at the stator/rotor interface in order to allow high integrated speed reduction to be performed. The driving torque is therefore considerably amplified, as a consequence of the torque/speed duality. Direct torque measurements are performed through a self-adjustable torque sensor that is integrated in the polysilicon rotor. The first experimental results presented here give rise to the expectations of numerous direct drive applications down to the micrometer scale.