Sub-Wavelength Nanostructures for Engineering the Effective Index of Silicon-On-Insulator Waveguides

被引:0
|
作者
Cheben, Pavel [1 ]
Schmid, Jens H. [1 ]
Bock, Przemek [2 ]
Xu, Dan-Xia [1 ]
Janz, Siegfried [1 ]
Delage, Andre [1 ]
Lapointe, Jean [1 ]
Lamontagne, Boris [1 ]
Densmore, Adam [1 ]
Hall, Trevor [2 ]
机构
[1] Natl Res Council Canada, Inst Microstruct Sci, Ottawa, ON, Canada
[2] Univ Ottawa, Ctr Res Photon, Ottawa, ON K1N 6N5, Canada
关键词
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中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
Silicon-on-insulator (SOI) is considered the most promising high-index-contrast waveguide platform for fabricating microphotonic devices with high integration density. However, there are fundamental challenges with this waveguide system related to the fixed values of the refractive indices of the constituent materials (Si and SiO2). In this paper, we present a method that can potentially circumvent this limitation by using the subwave-length grating effect in SOI waveguides to effectively engineer materials with intermediate refractive indices by standard lithographic patterning. The first implementations of the SWG effect in SOI waveguides are discussed, including our latest results in fiber-chip couplers, anti-reflective and high-reflectivity waveguide facets, mode transformers between waveguides of different geometries, and microphotonic waveguide crossings.
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页码:462 / +
页数:2
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