Prototyping of a precision mechanism using a hybrid-driven piezoelectric actuator

The object of this research is to prototype a precision system, which mainly consists of a piezoelectrically actuated cantilever beam structure as powered by an AC + DC hybrid driving circuit. Pulse width modulation (PWM) control algorithm as well as nonlinear tabulation are developed to capture characteristics of the specific hybrid driver and actuator, while dedicated driving techniques are elaborately explored for achieving fine motions of the beam. Enhanced apparatus such as a Doppler interferometer, a laser interferometer, and a conventional accelerometer are employed to quantify the dynamic as well as static deflections of the piezoactuator-driven structure. The experimental results validate the efficacy of the hybrid driver circuit as it is powering the piezoactuator-driven structure, and finite element method (FEM) approach also confirms the resonance frequency of the assembled mechanism.