Accurate extraction of trap depth responsible for RTS noise in nano-MOSFETs

被引:6
|
作者
Ma Zhong-Fa [1 ]
Zhang Peng [1 ]
Wu Yong [1 ]
Li Wei-Hua [1 ]
Zhuang Yi-Qi [1 ]
Du Lei [1 ]
机构
[1] Xidian Univ, Sch Microelect, Xian 710071, Peoples R China
关键词
trap; RTS noise; nano-MOSFETs; FIELD-EFFECT TRANSISTORS; COULOMB ENERGY;
D O I
10.1088/1674-1056/19/3/037201
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
This paper presents an accurate analytical model of the random telegraph signal (RTS) noise time-constant ratio ((tau) over bar (c)/(tau) over bar (e)) for RTS noise in nano-MOSFETs, in which the Coulomb-blockade effect on trapping and detrapping processes was taken into account. Based on this new model, the depth of the trap responsible for RTS noise in a sample n-type nano-MOSFET is extracted. The results show that large errors will be introduced to the calculated trap depth when the Coulomb-blockade effect is neglected.
引用
收藏
页数:4
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