Active Damping of Dynamical Structures Using Piezo Self Sensing

被引：3

作者：

Jansen, Bas ^{[1
]}

Butler, Hans ^{[1
,2
]}

Di Filippo, Ruben ^{[1
]}

机构：

[1] ASML, Mechatron Syst Dev, POB 324, NL-5500 AH Veldhoven, Netherlands

[2] Eindhoven Univ Technol, Elect Engn Control Syst Lab, POB 513, NL-5600 MB Eindhoven, Netherlands

来源：

IFAC PAPERSONLINE | 2019年 / 52卷 / 15期

关键词：

Piezo; LiNbO3; PZT; Self-sensing; Active damping;

D O I：

10.1016/j.ifacol.2019.11.732

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

Piezo actuators are widely used in high-precision equipment where accurate nanometer positioning is required. Piezo material, like PZT, show significant hysteretic behaviour, typically needing position feedback control or solutions like charge amplification to minimize hysteresis effects. Other materials like LiNbO3 show linear behaviour themselves. Both, however, have an inherent high stiffness and lightly damped mechanical resonances leading to unwanted vibration. This paper investigates the use of self sensing in piezo's, using current and voltage in the electrical domain, for active damping purposes. In particular, the combination with charge control is shown, and a hysteresis cancellation technique is proposed. (C) 2019, IFAC (International Federation of Automatic Control) Hosting by Elsevier Ltd. All rights reserved.

引用

页码：543 / 548

页数：6

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