Rapid & low-cost prototyping of metallic patterns in limited facilities condition

被引:2
|
作者
Abidov, Amir [1 ]
Kim, Sungjin [2 ]
Kim, Yong Bae [3 ]
Gomez-Solis, Christian [4 ]
机构
[1] Nanjing Tech Univ, Sch Energy Sci & Engn, 30 Puzhu Rd S,Pukou Dist, Nanjing 211816, Jiangsu, Peoples R China
[2] Kumoh Natl Inst Technol, Dept Adv Mat Sci & Engn, 61 Daehak Ro, Gumi 730701, Gyeongbuk, South Korea
[3] Gumi Elect & Informat Technol Res Inst, Innovat Technol Res Div, Cheomdangieop 1 Ro, Gumi 730853, Gyeongbuk, South Korea
[4] Univ Guanajuato, Dept Phys Engn, Guanajuato, Mexico
关键词
FABRICATION; LITHOGRAPHY; CONTACTS; SURFACE; MEMS; MASK;
D O I
10.1007/s10854-018-9567-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents rapid and cost-efficient prototyping metalizing method for fabrication of metal contacts. It demonstrates the technical improvement in metalizing achieved by transparency photomask printing compared to conventional methods. It describes fabrication of microelectrodes on various substrates such as glass and plastic using conventional office laser printer. Presented method can be used for quick prototyping of sensors, microheaters, micro hotplates and metal interconnects. Experimental results showed that prepared metallic micro contacts on glass substrate are compatible with conventional soldering.
引用
收藏
页码:14328 / 14334
页数:7
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