Near-field optical data storage using a nanometric aperture array

被引：0
|
作者：
Cha, JS [1 ]
Park, JH
Kim, MR
Jhe, WH
机构：
[1] Seoul Natl Univ, Res Inst Adv Mat, Ctr Near Field Atom Photon Technol, Dept Phys, Seoul 151742, South Korea
[2] LG Corp Inst Technol, Devices & Mat Lab, Seoul 137724, South Korea
来源：
JOURNAL OF THE KOREAN PHYSICAL SOCIETY | 2000年 / 37卷 / 05期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A 10 x 10 nanometric aperture array to be used for near-field optical recording was fabricated by using electron-beam lithography and anisotropic etching of a Si single-crystal wafer. Recording experiments on the four-layered phase-change optical disk demonstrated the feasibility of using the planar aperture array as an essential part of a data storage system based on near-field optics. From the present study, it is expected that near-field optical recording with a planar aperture array may be possible for enhanced reliability.
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页码：735 / 738
页数：4
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