Solvent-Assisted Decal Transfer Lithography by Oxygen-Plasma Bonding and Anisotropic Swelling

被引：19
|
作者：
Kim, Pilnam [1 ]
Kwak, Rhokyun [1 ]
Lee, Sung Hoon [1 ]
Suh, Kahp Y. [1 ]
机构：
[1] Seoul Natl Univ, Sch Mech & Aerosp Engn, World Class Univ Program Multiscale Mech Design, Seoul 151742, South Korea
来源：
ADVANCED MATERIALS | 2010年 / 22卷 / 22期
基金：
新加坡国家研究基金会;
关键词：
STAMP DEFORMATION; SCALE; SUBSTRATE; SURFACES; ADHESION;
D O I：
10.1002/adma.200903440
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Solvent-assisted decal transfer lithography (DTL) enables the formation of well-defined micro-/nanostructures over a large area (similar to 4 in. wafer) by combining irreversible oxygen bonding and anisotropic swelling of poly(dimethoxylsiloxane) (PDMS). Such swelling-induced stress gradient allows for cohesion failure of the skin layer upon removal of the stamp, leaving behind a highly uniform layer (similar to 100 nm).
引用
收藏
页码：2426 / +
页数：5
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