Femtosecond laser induced refractive index modifications for fabrication of three-dimensional integrated optical devices

被引：1
|
作者：
Will, M [1 ]
Burghoff, J [1 ]
Nolte, S [1 ]
Tuennermann, A [1 ]
机构：
[1] Univ Jena, Inst Appl Phys, D-6900 Jena, Germany
来源：
LASER MICROMACHINING FOR OPTOELECTRONIC DEVICE FABRICATION | 2003年 / 4941卷
关键词：
ultrashort laser pulses; microstructuring; waveguides; integrated optics;
D O I：
10.1117/12.468496
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present the fabrication of three-dimensional waveguide structures indide fused silica using the femtosecond laser direct-writing technique. The guiding properties of a produced 1 x 3 splitter are studied in detail. By appropriate choice of the processing parameters a multimode entrance port can be generated which allows to vary the splitting ratio by changing the input coupling. The processing requirements for such splitter devices will-be discussed.
引用
收藏
页码：58 / 64
页数：7
相关论文
共 50 条
  • [1] Fabrication of three-dimensional photonics devices using femtosecond laser pulses
    Will, M
    Burghoff, J
    Nolte, S
    Tuennermann, A
    COMMERCIAL AND BIOMEDICAL APPLICATIONS OF ULTRAFAST LASERS III, 2003, 4978 : 147 - 154
  • [2] Fabrication of three-dimensional photonic devices using femtosecond laser pulses
    Sohn, IB
    Lee, MS
    Lee, SM
    Woo, JS
    Jung, JY
    Micromachining and Microfabrication Process Technology X, 2005, 5715 : 92 - 100
  • [3] Three-dimensional microscopic modifications in glasses by a femtosecond laser
    Miura, K
    Qiu, JR
    Mitsuyu, T
    Hirao, K
    LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV, 1999, 3618 : 141 - 151
  • [4] Angular Scattering Pattern of Femtosecond Laser-Induced Refractive Index Modifications in Optical Fibers
    Reupert, Aaron
    Heck, Maximilian
    Nolte, Stefan
    Wondraczek, Lothar
    ADVANCED OPTICAL MATERIALS, 2020, 8 (18)
  • [5] Femtosecond laser-induced refractive index modifications in fluoride glass
    Berube, Jean-Philippe
    Bernier, Martin
    Vallee, Real
    OPTICAL MATERIALS EXPRESS, 2013, 3 (05): : 598 - 611
  • [6] Optical quality of hydrogel ophthalmic devices created with femtosecond laser induced refractive index modification
    Gandara-Montano, Gustavo A.
    Zheleznyak, Len
    Knox, Wayne H.
    OPTICAL MATERIALS EXPRESS, 2018, 8 (02): : 295 - 313
  • [7] Three-dimensional optical metamaterial with a negative refractive index
    Valentine, Jason
    Zhang, Shuang
    Zentgraf, Thomas
    Ulin-Avila, Erick
    Genov, Dentcho A.
    Bartal, Guy
    Zhang, Xiang
    NATURE, 2008, 455 (7211) : 376 - U32
  • [8] Three-dimensional optical metamaterial with a negative refractive index
    Jason Valentine
    Shuang Zhang
    Thomas Zentgraf
    Erick Ulin-Avila
    Dentcho A. Genov
    Guy Bartal
    Xiang Zhang
    Nature, 2008, 455 : 376 - 379
  • [9] Fabrication of hollow optical waveguides in fused silica by three-dimensional femtosecond laser micromachining
    F. He
    J. Lin
    Y. Cheng
    Applied Physics B, 2011, 105 : 379 - 384
  • [10] Fabrication of hollow optical waveguides in fused silica by three-dimensional femtosecond laser micromachining
    He, F.
    Lin, J.
    Cheng, Y.
    APPLIED PHYSICS B-LASERS AND OPTICS, 2011, 105 (02): : 379 - 384
12345