Electron-impact ionization of SiF4, C2F6, and the SFx (x=1-5) free radicals

被引:0
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作者
Basner, R [1 ]
Schmidt, M [1 ]
Denisov, E [1 ]
Deutsch, H [1 ]
Lopata, P [1 ]
Tarnovsky, V [1 ]
Becker, K [1 ]
机构
[1] Inst Niedertemp Plasmaphys, D-17449 Greifswald, Germany
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中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
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页码:17 / 18
页数:2
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