The phase diagrams of Sr-Bi-Ta-O system

The path of the crystal growth from the precursor to SET crystal has been investigated for obtaining the better way to fabricate SET films. The phase diagrams of the Sr-Bi-Ta-O system with the constituent element ratio close to SET crystal have been constructed. The thin film samples were prepared by metallo-organic decomposition method. The coated films were annealed in oxygen. The annealing temperature and the annealing period were varied as the parameters for the phase diagrams. In the case with Bi-rich nominal composition (compared with SET crystal), a fluorite-like structure appears at early stage of the crystal growth, then, SET phase is finally stabilized.