Super low velocity/piezoelectric substrate structure with high reflections and applications for surface acoustic wave wide band resonators and low-loss unidirectional transducer filters

被引：8

作者：

Satoh, Yusuke ^{[1
]}

Yamanouchi, Kazuhiko ^{[1
]}

机构：

[1] Tohoku Inst Technol, Sendai, Miyagi 9828577, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 7B期

关键词：

surface acoustic wave; low velocity thin films; high reflectivity substrate; unidirectional transducer; dispersive transducer; flat band low-loss filter;

D O I：

10.1143/JJAP.46.4739

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this paper, the propagation characteristics and reflectivities of TeO2 grating/128 degrees Y-X LiNbO3, 36 degrees Y-X LiTaO3, and 5 degrees Y-X LiNbO3 are analyzed and applied to resonators and, conventional and dispersive unidirectional transducers. Theoretical results of thin film gratings show the large impedance ratio, for example, thin film grating shows r = 0.96 at a thickness of H/lambda = 0.01, for 128 degrees Y-X LiNbO3. The experimental results for an interdigital transducer (IDT) resonator of thin film/Al/ 128 degrees Y-X LiNbO3 with N = 100, W = 20 lambda, H/lambda = 0.01 show an admittance of 1.0 S. The experimental unidirectional transducer filter using thin film TeO2 (H/lambda = 0.015)/Al/128 degrees Y-X LiNbO3 show a 1.6 dB insertion loss at 500 MHz without matching. Moreover filters with the phase linear, flat wide band, and low loss characteristics are developed using dispersive unidirectional IDT.

引用

页码：4739 / 4743

页数：5

共 49 条

[1] Low-loss unidirectional transducer for high frequency surface acoustic wave devices
Biryukov, S. V.
Martin, G.
Schmidt, H.
Wall, B.
JOURNAL OF APPLIED PHYSICS, 2011, 110 (07)
[2] 5∼10 GHz surface acoustic wave resonators and low-loss wide band filters using submicron fabrication technology
Yamanouchi, K.
Satoh, Y.
Isano, H.
Kawasaki, D.
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XI, 2006, 6109
[3] LOW-LOSS SURFACE-ACOUSTIC-WAVE FILTERS
POTTER, BR
HARTMANN, CS
IEEE TRANSACTIONS ON PARTS HYBRIDS AND PACKAGING, 1977, 13 (04): : 348 - 353
[4] Super Low Velocity Thin Film Gratings/Piezoelectric Substrate Structure With High Reflectivities and Applications for SAW Resonator Filters, Unidirectional SAW Transducers and Bulk Acoustic Resonator Filters
Yamanouchi, Kazuhiko
Satoh, Yusuke
2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 1197 - 1200
[5] 5 GHz range low-loss wide band surface acoustic wave filters using electrode thickness difference type unidirectional transducers
Odagawa, H
Meguro, T
Yamanouchi, K
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1996, 35 (5B): : 3028 - 3031
[6] 5 GHz range low-loss wide band surface acoustic wave filters using electrode thickness difference type unidirectional transducers
Odagawa, H.
Meguro, T.
Yamanouchi, K.
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (5 B): : 3028 - 3031
[7] Low-loss wide-band floating electrode type unidirectional transducer filters and ladder-type resonator filters using high-temperature-stable high electromechanical coupling surface acoustic wave substrates
Yamanouchi, K
Ishii, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2003, 42 (5B): : 3166 - 3169
[8] Low-loss wide-band floating electrode type unidirectional transducer filters and ladder-type resonator filters using high-temperature-stable high electromechanical coupling surface acoustic wave substrates
Yamanouchi, Kazuhiko
Ishii, Toru
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2003, 42 (5 B): : 3166 - 3169
[9] Technique for low-loss and wideband surface acoustic wave filters
Dai, EG
ELECTRONICS LETTERS, 2000, 36 (22) : 1904 - 1905
[10] WIDEBAND LOW-LOSS SURFACE ACOUSTIC-WAVE FILTERS
SHIU, YA
ZHANG, D
JIANG, WH
WU, WQ
QIU, PC
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1983, 30 (03): : 223 - 223

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