A VISCOELASTIC-AWARE EXPERIMENTALLY-DERIVED MODEL FOR ANALOG RF MEMS VARACTORS

被引：0

作者：

Hsu, Hao-Han ^{[1
]}

Peroulis, Dimitrios ^{[1
]}

机构：

[1] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA

来源：

MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年

关键词：

BEHAVIOR; FILMS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we present, for the first time, an experimentally-extracted model for the spring constant and tuning range of an analog RF-MEMS varactor that includes viscoelastic effects in RF-MEMS devices. By utilizing a bi-state bias condition with one state lasting 60 minutes and the other 1 minute, this model focuses on capturing the true electromechanical behavior of the varactor. An experimental setup with very high long-term accuracy is created to measure capacitance of the varactor up to 1,370 hours. The impact of these effects and the effectiveness of the model are demonstrated on a tunable-resonator loaded with RF-MEMS varactors

引用

页码：783 / 786

页数：4

共 10 条

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