A two degrees-of-freedom piezoelectric single-crystal micromotor

被引：38
|
作者：
Chen, Zhijiang [1 ]
Li, Xiaotian [1 ]
Liu, Guoxi [1 ]
Dong, Shuxiang [1 ]
机构：
[1] Peking Univ, Coll Engn, Dept Mat Sci & Engn, Beijing 100871, Peoples R China
来源：
JOURNAL OF APPLIED PHYSICS | 2014年 / 116卷 / 22期
基金：
中国国家自然科学基金;
关键词：
ULTRASONIC MOTORS; ACTUATOR;
D O I：
10.1063/1.4903834
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A two degrees-of-freedom (DOF) ultrasonic micromotor made of piezoelectric Pb(In1/2Nb1/2) O-3-Pb(Mg1/3Nb2/3)O-3-PbTiO3 (PIN-PMN-PT) single crystal square-bar (dimensions 2 x 2 x 9 mm(3)) was developed. The PIN-PMN-PT square-bar stator can generate standing wave elliptical motions in two orthogonal vertical planes by combining the first longitudinal and second bending vibration modes, enabling it to drive a slider in two orthogonal directions. The relatively large driving forces of 0.25 N and motion speed of 35 mm/s were obtained under a voltage of 80 V-pp at its resonance frequency of 87.5 kHz. The proposed micromotor has potential for applications in micro robots, cell manipulators, and digital cameras as a two-DOF actuator. (C) 2014 AIP Publishing LLC.
引用
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页数：5
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