Suppression on Nonlinearity of Mode-Localized Sensors Using Algebraic Summation of Amplitude Ratios as the Output Metric

被引:14
|
作者
Zhang, Hemin [1 ]
Kang, Hao [1 ]
Chang, Honglong [1 ]
机构
[1] Northwestern Polytech Univ, Sch Mech Engn, Minist Educ, Key Lab Micro & Nano Syst Aerosp, Xian 710072, Shaanxi, Peoples R China
基金
中国国家自然科学基金;
关键词
Resonant sensors; mode localization; linear sensing; nonlinearity;
D O I
10.1109/JSEN.2018.2857923
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Compared with the classic frequency-modulated resonant sensors, the recently emerging sensing scheme based on the mode localization phenomenon of the weakly coupled resonators provides the improved sensitivity by more than 2 orders of magnitude using amplitude ratio as the output metric. However, the inherent loci veeringphenomenon of the amplitude ratio over stiffness perturbation curvegenerates strong or weak nonlinearities in different zones, severelylimiting the linear sensing ranges. In this paper, we propose to use the algebraic summation of the amplitude ratios of two vibrational modes for eliminating the nonlinear errors caused by loci veering, extending the linear sensing range to the fullscale. This new output metric was verified as being very effective to suppress the nonlinear errors using two mode-localized stiffness sensors with 2 and 3 degrees of freedom coupled resonators. This is the first theoretically and experimentally demonstrated full-scale linear output metric for mode-localized sensors, which will push forward more applications of the mode-localized sensing scheme.
引用
收藏
页码:7802 / 7809
页数:8
相关论文
共 3 条
  • [1] Algebraic Summation of Eigenstates as a Novel Output Metric to Extend the Linear Sensing Range of Mode-localized Sensors
    Zhang, Hemin
    Zhong, Jiming
    Yang, Jing
    Yuan, Weizheng
    Kang, Hao
    Chang, Honglong
    2017 IEEE SENSORS, 2017, : 7 - 9
  • [2] Impact of output metric on the resolution of mode-localized MEMS resonant sensors
    Juillard, J.
    Prache, P.
    Ferreira, P. Maris
    Barniol, N.
    2017 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC), 2017, : 506 - 509
  • [3] THE TEMPERATURE DRIFT SUPPRESSION OF MODE-LOCALIZED RESONANT SENSORS
    Zhong, Jiming
    Yang, Jing
    Chang, Honglong
    2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018, : 467 - 470