Dielectric Charging Characterization in MEMS Switches with Insulator-Insulator Contact

被引：0
|
作者：
Molinero, David [1 ]
Cunningham, Shawn [1 ]
DeReus, Dana [1 ]
Morris, Art [1 ]
机构：
[1] Wispry Inc, Irvine, CA 92618 USA
来源：
2014 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM | 2014年
关键词：
Dielectrics; Micromechanical Devices; Charging; Switches; RF MEMS; triboelectric effects; RF-MEMS; LIFETIME;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A dielectric charging characterization is presented based on simple MEMS structures with insulator-insulator contact. Surface charging is generated by triboelectric effects when the MEMS switch is actuated and both insulators are in contact. Hold-down measurements were done to characterize the surface charging over a broad range of voltage and temperature. The results have shown that the pull-in voltage shift is a key charging parameter with a characteristic temperature dependent time constant.
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页数：4
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