Influence of deposition rate on the formation of growth twins in sputter-deposited 330 austenitic stainless steel films

被引:21
|
作者
Zhang, X. [1 ]
Anderoglu, O.
Misra, A.
Wang, H.
机构
[1] Texas A&M Univ, Dept Mech Engn, College Stn, TX 77843 USA
[2] Los Alamos Natl Lab, Mat Phys & Applicat Div, Los Alamos, NM 87545 USA
[3] Texas A&M Univ, Dept Elect Engn, College Stn, TX 77843 USA
基金
美国国家科学基金会;
关键词
D O I
10.1063/1.2720708
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors have studied the influence of deposition rate on the formation of growth twins in sputter-deposited 330 austenitic stainless steel thin films. Transmission electron microscopy shows that the volume fraction of twinned grains increases with increasing deposition rate, whereas the average columnar grain size and twin spacing stay approximately unchanged. These experimental results agree qualitatively with their analytical model that predicts deposition rate dependent formation of growth twins. The film hardness increases monotonically with increasing volume fraction of twinned grains. (c) 2007 American Institute of Physics.
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页数:3
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