Optical micro encoder using surface-emitting laser

被引：4
|
作者：
Miyajima, H [1 ]
Yamamoto, E [1 ]
Ito, M [1 ]
Hashimoto, S [1 ]
Komazaki, I [1 ]
Shinohara, S [1 ]
Yanagisawa, K [1 ]
机构：
[1] OLYMPUS OPT CO LTD,HACHIOJI,TOKYO 192,JAPAN
来源：
NINTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS, IEEE PROCEEDINGS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND SYSTEMS | 1996年
关键词：
D O I：
10.1109/MEMSYS.1996.494017
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
引用
收藏
页码：412 / 417
页数：6
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