Development of hybrid amorphous barrier coatings on polymer substrates

Flexible hybrid Ta-C-O-F coatings were deposited on polyethylene naphthalate substrates using RF co-sputtering method. The morphologies of the hybrid Ta-C-O-F coatings co-sputtering were strongly dependent on polytetrafluoroethylene (PTFE) sputtering power. By increasing the polymer sputtering power from 20 to 60W, the water vapor transmission rate increase from 0.015 to 0.030g/m(2)day. The water vapor transmission rate remains relatively constant at 0.030g/m(2)day with further increasing the PTFE power to 80W. Coatings prepared by PTFE sputtering power of 20 to 80W exhibits an average optical transmittance of higher than 70% in the visible range. The Ta-C-O-F coating with a thickness of 577.5nm was repeatedly FLexed back and forth to a radius of curvature of 3mm. No cracks were observed in the layer after bending. The results show that the hybrid coatings are not only highly flexible, but also with good water vapor barrier property.