Plasma generation by dielectric resonator arrays

被引：26

作者：

Dennison, Stephen ^{[1
]}

Chapman, Adam ^{[1
]}

Luo, Wei ^{[2
]}

Lanagan, Michael ^{[2
,3
]}

Hopwood, Jeffrey ^{[1
]}

机构：

[1] Tufts Univ, Dept Elect & Comp Engn, Medford, MA 02155 USA

[2] Penn State Univ, Mat Res Inst, University Pk, PA 16802 USA

[3] Penn State Univ, Dept Engn Sci & Mech, University Pk, PA 16802 USA

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 2016年 / 25卷 / 03期

关键词：

microwave plasma; microwave breakdown; high-k dielectric resonators; plasma metamaterials; DESIGN;

D O I：

10.1088/0963-0252/25/3/03LT02

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Arrays of dielectric resonators-illuminated by an antenna-are used to ignite and sustain multiple microwave plasmas in parallel. Calcium titanate cylindrical resonators were arranged in a linear array with separation distances between 0.5 and 5 mm. The operating frequency was near the HEM111 resonance of 1.1 GHz. Paschen curves of the breakdown field and voltage in argon atmosphere are consistent with parallel plate microwave breakdown except within discharge gaps of 1 mm or less. Sustaining of argon plasma between 0.5 Torr and 1 atm within the array is found to alter the electromagnetic scattering from the dielectric resonators, suggesting applications in plasma-reconfigurable metamaterials and photonic crystals.

引用

页数：6

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