AlN SAW structures for GHz applications

被引:0
|
作者
Mueller, A. [1 ]
Konstantinidis, G. [2 ]
Neculoiu, D. [1 ]
Dinescu, A. [1 ]
Morosanu, C. [3 ]
Stavrinidis, A. [2 ]
Dragoman, M. [1 ]
Vasilache, D. [1 ]
Buiculescu, C. [1 ]
Petrini, I. [1 ]
Anton, C. [1 ]
机构
[1] IMT Bucharest, 32B Eron Iancu Nicolae St, Bucharest 71190, Romania
[2] FORTH IESL Heraklion, Iraklion, Greece
[3] Natl Inst Mat Phys, Bucharest, Romania
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1574 / +
页数:3
相关论文
共 50 条
  • [1] SAW sensors on Aln/diamond/Si structures
    Benetti, M
    Cannatà, D
    D'Amico, A
    Di Pietrantonio, F
    Macagnano, A
    Verona, E
    PROCEEDINGS OF THE IEEE SENSORS 2004, VOLS 1-3, 2004, : 753 - 756
  • [2] AlN/IDT/AlN/Sapphire as Packageless Structure for SAW Applications in Harsh Environments
    Legrani, O.
    Elmazria, O.
    Bartasyte, A.
    Aubert, T.
    Talbi, A.
    2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2012, : 2102 - 2105
  • [3] AlN/IDT/AlN/Sapphire SAW Heterostructure for High-Temperature Applications
    Legrani, Ouarda
    Aubert, Thierry
    Elmazria, Omar
    Bartasyte, Ausrine
    Nicolay, Pascal
    Talbi, Abdelkrim
    Boulet, Pascal
    Ghanbaja, Jaafar
    Mangin, Denis
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2016, 63 (06) : 898 - 906
  • [4] Platinum/AlN/Sapphire SAW resonator operating in GHz range for High temperature Wireless SAW sensor
    Blampain, E.
    Elmazria, O.
    Legrani, O.
    Mc Murtry, S.
    Montaigne, F.
    Fu, C.
    Lee, K. K.
    Yang, S. S.
    2013 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2013, : 1073 - 1076
  • [5] 5GHz SAW devices based on AlN/diamond layered structure
    Kirsch, P.
    Assouar, M. B.
    Elmazria, O.
    Alnot, P.
    2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS, 2006, : 2293 - 2296
  • [6] Packageless AlN/ZnO/Si Structure for SAW Devices Applications
    Legrani, Ouarda
    Elmazria, Omar
    Zhgoon, Sergei
    Pigeat, Philippe
    Bartasyte, Ausrine
    IEEE SENSORS JOURNAL, 2013, 13 (02) : 487 - 491
  • [7] Coupled BAW/SAW Resonators Using AlN/Mo/Si and AlN/Mo/GaN Layered Structures
    Qamar, Afzaal
    Rais-Zadeh, Mina
    IEEE ELECTRON DEVICE LETTERS, 2019, 40 (02) : 321 - 324
  • [8] Studies on a novel structure of ZnO/AlN/diamond for SAW device applications
    Zeng, Qingkai
    Wang, Linjun
    Huang, Jian
    Tang, Ke
    Xia, Yiben
    SEVENTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS, 2011, 7995
  • [9] 15 GHz SAW Nano-Transducers Using Ultrananocrystalline Diamond/AlN Thin Films
    Dow, Ali B. Alamin
    Ahmed, A.
    Bittner, A.
    Popov, C.
    Schmid, U.
    Kherani, Nazir P.
    2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2012, : 968 - 971
  • [10] Fabrication of a 4.4 GHz oscillator using SAW excited on epitaxial AlN grown on a Sapphire substrate
    Salut, Roland
    Martin, Gilles
    Daniau, William
    Claudel, Arnaud
    Pique, Didier
    Ballandras, Sylvain
    2013 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), 2013, : 267 - 270