Direct ultrafast laser micro-structuring of materials using programmable beam shaping

被引：61
|
作者：
Sanner, N.
Huot, N.
Audouard, E.
Larat, C.
Huignard, J.-P.
机构：
[1] CNRS, UMR 5516, Lab Traitement Signal & Instrumentat, F-42000 St Etienne, France
[2] Thales Res & Technol, F-91404 Orsay, France
来源：
OPTICS AND LASERS IN ENGINEERING | 2007年 / 45卷 / 06期
关键词：
femtosecond laser processing; laser beam shaping;
D O I：
10.1016/j.optlaseng.2006.10.009
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Using active and programmable focal-spot shaping, we demonstrate direct femtosecond laser micro-structuring of materials. Surface marking as well as drilling with user-defined geometrical shapes of small dimensions (20 mu m) are performed, without moving the laser beam nor the material target. (C) 2006 Elsevier Ltd. All rights reserved.
引用
收藏
页码：737 / 741
页数：5
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