Dynamic optimization of dissipative PDEs using control vector parameterization: Application to GaN thin film epitaxy

被引:0
|
作者
Armaou, A [1 ]
Varshney, A [1 ]
机构
[1] Penn State Univ, Dept Chem Engn, University Pk, PA 16802 USA
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中图分类号
TP [自动化技术、计算机技术];
学科分类号
0812 ;
摘要
We present an approach that links nonlinear model reduction techniques with control vector parametrization-based schemes to efficiently solve dynamic constraint optimization problems arising in the context of spatially-distributed processes governed by highly-dissipative nonlinear partial differential equations (PDEs). The proposed approach is applied to a Metal-Organic Vapor-Phase Epitaxy process for the production of GaN thin films, with the objective to minimize the spatial non-uniformity of the deposited film across the substrate surface.
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页码:279 / 286
页数:8
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