Design and control of a nano-precision Cartesian platform

被引：2

作者：

Ting, Yung ^{[1
]}

Li, Chun-Chung ^{[1
]}

Jar, Ho-Chin ^{[1
]}

Chiang, Chang-Wei ^{[1
]}

机构：

[1] Chung Yuan Christian Univ, Dept Mech Engn, No 200 Chung Pei Rd, Chungli 32023, Taiwan

来源：

2006 IEEE/RSJ INTERNATIONAL CONFERENCE ON INTELLIGENT ROBOTS AND SYSTEMS, VOLS 1-12 | 2006年

关键词：

nano-scale positioning platform; flexure hinge mechanism; hysteresis effect; Ziegler-Nichols method; genetic algorithm;

D O I：

10.1109/IROS.2006.282315

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this article, a Cartisian coordinate nano-scale positioning platform driven by stack-type piezoelectric actuator associated with flexure hinge mechanism is developed. Structural design and analysis, system identification, and feed-forward controller design to deal with the hysteresis effect, as well as and the feedback PID controller designed by use of Ziegler-Nichols method and the genetic algorithm are included. The developed Cartesian platform is able to achieve the target within 10 nm in positioning at the stroke of 19 mu m.

引用

页码：1898 / +

页数：2

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