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- [4] 157 nm: Deepest deep-ultraviolet yet Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 17 : 3262 - 3266
- [5] 157 nm: Deepest deep-ultraviolet yet JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (06): : 3262 - 3266