Research on acoustic sensing device based on microfiber knot resonator

被引：10

作者：

Zhao, Rongyu ^{[1
]}

Cui, Jiangong ^{[1
]}

Yu, Yaxin ^{[1
]}

Zhai, Xiaoping ^{[1
]}

Chu, Xiaoxia ^{[1
]}

Zhu, Min ^{[1
]}

Wu, Bofeng ^{[1
]}

Yang, Yuhua ^{[1
]}

Wang, Renxin ^{[1
]}

He, Changde ^{[1
]}

Zhang, Guojun ^{[1
]}

Zhang, Wendong ^{[1
]}

机构：

[1] North Univ China, State Key Lab Dynam Measurement Technol, Taiyuan 030051, Peoples R China

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2022年 / 32卷 / 08期

基金：

中国国家自然科学基金;

关键词：

optical fibers; MKR; PDMS; acoustic sensor; RING-RESONATOR; TEMPERATURE; SILICA;

D O I：

10.1088/1361-6439/ac7842

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

An acoustic sensor packaged with polydimethylsiloxane film sandwich structure is proposed in this paper. The sensor uses a flat glass with a square hole in the middle as the substrate structure. The cavity length of the microfiber knot resonator is significantly changed by the applied acoustic pressure, which is ultimately manifested as a change in the strength of the sensor signal. The sensor has a good response at frequencies from 0.1 to 10 kHz, and has a sensitivity of 0.92 mV Pa-1 at 1 kHz acoustic frequency. The sensor studied in this paper has the advantages of wide frequency band, small size and low cost, and has a good application prospect in the field of acoustic signal detection.

引用

页数：8

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