Synthesis of nanoscale multilayered ZrN/W coatings by ion beam assisted deposition

被引：2
|
作者：
Li, DeJun [1 ]
Zhang, JingJing [1 ]
Wang, MingXia [1 ]
机构：
[1] Tianjin Normal Univ, Coll Phys & Elect Informat Sci, Tianjin 300074, Peoples R China
来源：
SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES | 2007年 / 50卷 / 02期
基金：
中国国家自然科学基金;
关键词：
IBAD; ZrN/W; multilayered coating; nanoscale;
D O I：
10.1007/s11431-007-0023-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
ZrNM multilayered coatings with different modulation periods at the nanoscale have been synthesized at different N+ beam bombarding energies using IBAD. Various characterization techniques such as XRD, AES, nano indenter and profiler were employed to investigate the influence of modulation period and bombarding energy on microstructure and mechanical properties of the coatings. The results showed that all superlattice coatings had better mechanical properties than the monolithic ZrN and W coatings. At an optimal condition with 300 eV N+ beam bombarding energy and 8-9 nm modulation period, XRD pattern possessed a significantly structural mixture of strong ZrN (111), W (110), as well as weak ZrN (220) textures in the multilayered coating. The optimal condition resulted in higher hardness (26 GPa), elastic modulus (310 GPa) and fracture resistance of the coating than other conditions.
引用
收藏
页码：206 / 212
页数：7
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